MEMS resonator mass loading noise model: The case of bimodal adsorbing surface and finite adsorbate amount

Modeling of adsorption and desorption in microelectromechanical systems (MEMS) generally is crucial for their optimization control, whether it necessary to decrease the adsorption-desorption influence (thus ensuring stable operation ultra-precise micro nanoresonators) or increase (and enhancing this manner sensitivity chemical biological resonant sensors). In work we derive use analytical mathematical expressions model stochastic fluctuations mass adsorbed on MEMS resonator (mass loading noise). We consider case where surface incorporates two different types binding sites non-negligible depletion adsorbate occurs a closed chamber. arrive at novel expression power spectral density noise resonators prove necessity its application cases when are exposed low concentrations. approach presented here calculate performance. way ensure these devices consequentially abatement noise-caused degradation operation, both micro/nanoresonators sensors. This intended general design, development based mechanical resonators, ranging from RF components